Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7462844 | Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation | Shengwu Chang, Isao Tsunoda, Dennis Rodier, Joseph C. Olson, Donna L. Smatlak +2 more | 2008-12-09 |