Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7683347 | Technique for improving ion implantation throughput and dose uniformity | Atul Gupta, Anthony Renau, Joseph C. Olson | 2010-03-23 |
| 7655922 | Techniques for confining electrons in an ion implanter | Gordon C. Angel, Rajesh Dorai | 2010-02-02 |
| 7462844 | Method, system, and apparatus for improving doping uniformity in high-tilt ion implantation | Shengwu Chang, Isao Tsunoda, Nobihiro Tokoro, Dennis Rodier, Joseph C. Olson +2 more | 2008-12-09 |
| 7459704 | Ion source configuration for production of ionized clusters, ionized molecules and ionized mono-atoms | Joseph C. Olson, Anthony Renau, Kurt Deckerlucke, Paul J. Murphy, Alexander S. Perel +2 more | 2008-12-02 |
| 7402816 | Electron injection in ion implanter magnets | Anthony Renau, James S. Buff, Eric D. Hermanson | 2008-07-22 |
| 7166854 | Uniformity control multiple tilt axes, rotating wafer and variable scan velocity | Anthony Renau, Joseph C. Olson, Jun Lu | 2007-01-23 |
| 7161161 | Uniformity control using multiple fixed wafer orientations and variable scan velocity | Anthony Renau, Joseph C. Olson, Jun Lu | 2007-01-09 |
| 6791094 | Method and apparatus for determining beam parallelism and direction | Joseph C. Olson, Paul A. Daniel | 2004-09-14 |
| 6403972 | Methods and apparatus for alignment of ion beam systems using beam current sensors | Antonella Cucchetti, Leo V. Klos, Joseph C. Olson, Raymond L. Pelletier, Keith Pierce +1 more | 2002-06-11 |
| 5479254 | Continuous, real time microwave plasma element sensor | Paul P. Woskov, Daniel R. Cohn, J. Kenneth Wittle, Charles H. Titus, Jeffrey E. Surma | 1995-12-26 |
| 5256854 | Tunable plasma method and apparatus using radio frequency heating and electron beam irradiation | Leslie Bromberg, Daniel R. Cohn, William C. Guss, Barton Lane | 1993-10-26 |
| 5061838 | Toroidal electron cyclotron resonance reactor | Barton Lane, Herbert H. Sawin | 1991-10-29 |