Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7037846 | Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing | Aseem K. Srivastava, Palanikumaran Sakthievel | 2006-05-02 |
| 6761796 | Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing | Aseem K. Srivastava, Palanikumaran Sakthievel | 2004-07-13 |
| 6740247 | HF vapor phase wafer cleaning and oxide etching | Yong-Pil Han | 2004-05-25 |
| 6183566 | UV/halogen metals removal process | Andrew Scott Lawing, Robert T. Fayfield, Jane Chang | 2001-02-06 |
| 6156435 | Chemical vapor deposition of fluorocarbon polymer thin films | Karen K. Gleason, Scott J. Limb, Edward F. Gleason, David J. Edell | 2000-12-05 |
| 6153115 | Monitor of plasma processes with multivariate statistical analysis of plasma emission spectra | Minh Le, Kuang Han Chen, Taber H. Smith, Duane S. Boning | 2000-11-28 |
| 6153269 | Chemical vapor deposition of fluorocarbon polymer thin films | Karen K. Gleason, Scott J. Limb, Edward F. Gleason, David J. Edell | 2000-11-28 |
| 6107166 | Vapor phase cleaning of alkali and alkaline earth metals | Jeffery W. Butterbaugh, Zhe Zhang, Yong-Pil Han | 2000-08-22 |
| 6083413 | Metals removal process | Jane Chang, Andrew Scott Lawing, Zhe Zhang, Han Xu | 2000-07-04 |
| 5954884 | UV/halogen metals removal process | Andrew Scott Lawing, Robert T. Fayfield, Jane Chang | 1999-09-21 |
| 5888591 | Chemical vapor deposition of fluorocarbon polymer thin films | Karen K. Gleason, Scott J. Limb, Edward F. Gleason, David J. Edell | 1999-03-30 |
| 5450205 | Apparatus and method for real-time measurement of thin film layer thickness and changes thereof | William T. Conner, Timothy J. Dalton, Emanuel M. Sachs | 1995-09-12 |
| 5061838 | Toroidal electron cyclotron resonance reactor | Barton Lane, Donna L. Smatlak | 1991-10-29 |