PS

Palanikumaran Sakthievel

AT Axcelis Technologies: 2 patents #105 of 300Top 35%
📍 Gaithersburg, MD: #769 of 1,746 inventorsTop 45%
🗺 Maryland: #13,387 of 35,612 inventorsTop 40%
Overall (All Time): #2,168,399 of 4,157,543Top 55%
2
Patents All Time

Issued Patents All Time

Showing 1–2 of 2 patents

Patent #TitleCo-InventorsDate
7037846 Method and apparatus for micro-jet enabled, low energy ion generation and transport in plasma processing Aseem K. Srivastava, Herbert H. Sawin 2006-05-02
6761796 Method and apparatus for micro-jet enabled, low-energy ion generation transport in plasma processing Aseem K. Srivastava, Herbert H. Sawin 2004-07-13