Issued Patents All Time
Showing 1–23 of 23 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11458512 | Systems and methods for rotating and translating a substrate in a process chamber | — | 2022-10-04 |
| 11355376 | Systems and methods for treating substrates with cryogenic fluid mixtures | Chimaobi W. Mbanaso, David S. Becker | 2022-06-07 |
| 11207715 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Christina Ann Rathman, Alan D. Rose | 2021-12-28 |
| 10991610 | Systems and methods for treating substrates with cryogenic fluid mixtures | Chimaobi W. Mbanaso | 2021-04-27 |
| 10843236 | Systems and methods for rotating and translating a substrate in a process chamber | — | 2020-11-24 |
| 10748789 | Systems and methods for treating substrates with cryogenic fluid mixtures | Chimaobi W. Mbanaso, David S. Becker | 2020-08-18 |
| 10062596 | Systems and methods for treating substrates with cryogenic fluid mixtures | Chimaobi W. Mbanaso, David S. Becker | 2018-08-28 |
| 10020217 | Systems and methods for treating substrates with cryogenic fluid mixtures | Chimaobi W. Mbanaso, David S. Becker | 2018-07-10 |
| 10014191 | Systems and methods for treating substrates with cryogenic fluid mixtures | Chimaobi W. Mbanaso, David S. Becker | 2018-07-03 |
| 9691628 | Process for silicon nitride removal selective to SiGex | Anthony S. Ratkovich | 2017-06-27 |
| 9299570 | Process for silicon nitride removal selective to SiGex | Anthony S. Ratkovich | 2016-03-29 |
| 9059104 | Process for selectively removing nitride from substrates | Anthony S. Ratkovich, David S. Becker | 2015-06-16 |
| 8920577 | Process for treatment of substrates with water vapor or steam | David DeKraker, Richard E. Williamson | 2014-12-30 |
| 7819984 | Process for treatment of substrates with water vapor or steam | David DeKraker, Richard E. Williamson | 2010-10-26 |
| 7025831 | Apparatus for surface conditioning | David C. Gray, Robert T. Fayfield, Kevin L. Siefering, John M. Heitzinger, Fred C. Hiatt | 2006-04-11 |
| 6465374 | Method of surface preparation | Brent Schwab | 2002-10-15 |
| 6124211 | Cleaning method | David C. Gray, Robert T. Fayfield | 2000-09-26 |
| 6107166 | Vapor phase cleaning of alkali and alkaline earth metals | Herbert H. Sawin, Zhe Zhang, Yong-Pil Han | 2000-08-22 |
| 6015503 | Method and apparatus for surface conditioning | David C. Gray, Robert T. Fayfield, Kevin L. Siefering, John M. Heitzinger, Fred C. Hiatt | 2000-01-18 |
| 5782986 | Process for metals removal using beta-diketone or beta-ketoimine ligand forming compounds | David C. Gray | 1998-07-21 |
| 5716495 | Cleaning method | David C. Gray | 1998-02-10 |
| 5580421 | Apparatus for surface conditioning | C. Fred Hiatt, David C. Gray | 1996-12-03 |
| 5534107 | UV-enhanced dry stripping of silicon nitride films | David C. Gray | 1996-07-09 |