Issued Patents All Time
Showing 1–20 of 20 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334348 | Substrate scanning apparatus with pendulum and rotatable substrate holder | Michael Gruenhagen, Matthew C. Gwinn | 2025-06-17 |
| 11707770 | Pressure control strategies to provide uniform treatment streams in the manufacture of microelectronic devices | Edward Hanzlik | 2023-07-25 |
| 11309178 | Treatment systems with repositionable nozzle useful in the manufacture of microelectronic devices | — | 2022-04-19 |
| 11241720 | Pressure control strategies to provide uniform treatment streams in the manufacture of microelectronic devices | Edward Hanzlik | 2022-02-08 |
| 9911631 | Processing system and method for providing a heated etching solution | William P. Inhofer | 2018-03-06 |
| 9831107 | Processing system and method for providing a heated etching solution | William P. Inhofer, David DeKraker | 2017-11-28 |
| 9490138 | Method of substrate temperature control during high temperature wet processing | — | 2016-11-08 |
| 9412639 | Method of using separate wafer contacts during wafer processing | David DeKraker | 2016-08-09 |
| 7312161 | Advanced process control for low variation treatment in immersion processing | Steven L. Nelson | 2007-12-25 |
| 7025831 | Apparatus for surface conditioning | Jeffery W. Butterbaugh, David C. Gray, Robert T. Fayfield, John M. Heitzinger, Fred C. Hiatt | 2006-04-11 |
| 6845779 | Edge gripping device for handling a set of semiconductor wafers in an immersion processing system | Tim Herbst, Todd Maciej, Tracy A. Gast, Thomas J. Wagener | 2005-01-25 |
| 6284006 | Processing apparatus for microelectronic devices in which polymeric bellows are used to help accomplish substrate transport inside of the apparatus | Timothy V. Seppanen | 2001-09-04 |
| 6251195 | Method for transferring a microelectronic device to and from a processing chamber | Thomas J. Wagener, John C. Patrin, William P. Inhofer | 2001-06-26 |
| 6221781 | Combined process chamber with multi-positionable pedestal | Scott W. Hamre, Michael J. Foline | 2001-04-24 |
| 6015503 | Method and apparatus for surface conditioning | Jeffery W. Butterbaugh, David C. Gray, Robert T. Fayfield, John M. Heitzinger, Fred C. Hiatt | 2000-01-18 |
| 5942037 | Rotatable and translatable spray nozzle | Thomas J. Wagener, Pamela Kunkel, James F. Weygand, Gregory P. Thomes | 1999-08-24 |
| 5810942 | Aerodynamic aerosol chamber | Natraj Narayanswami, Thomas J. Wagener, William A. Cavaliere | 1998-09-22 |
| 5373701 | Cryogenic station | Walter H. Whitlock | 1994-12-20 |
| 5304796 | Atmospheric pressure ionization mass spectroscopy method including a silica gel drying step | Walter H. Whitlock | 1994-04-19 |
| 5224265 | Fabrication of discrete thin film wiring structures | John B. Dux, Janet L. Poetzinger, Roseanne M. Prestipino | 1993-07-06 |