Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545387 | Magnetic integrated lift pin system for a chemical processing chamber | Sean Moore, Todd Maciej | 2023-01-03 |
| 10910253 | Magnetically levitated and rotated chuck for processing microelectronic substrates in a process chamber | Sean Moore, Lance Van Elsen | 2021-02-02 |
| 9982664 | Systems and methods for metering a dose volume of fluid used to treat microelectronic substrates | Lance Van Elsen | 2018-05-29 |
| 9911631 | Processing system and method for providing a heated etching solution | Kevin L. Siefering | 2018-03-06 |
| 9831107 | Processing system and method for providing a heated etching solution | Kevin L. Siefering, David DeKraker | 2017-11-28 |
| 6251195 | Method for transferring a microelectronic device to and from a processing chamber | Thomas J. Wagener, John C. Patrin, Kevin L. Siefering | 2001-06-26 |