Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6578369 | Nozzle design for generating fluid streams useful in the manufacture of microelectronic devices | Pam Kunkel, Natraj Narayanswani | 2003-06-17 |
| 6251195 | Method for transferring a microelectronic device to and from a processing chamber | Thomas J. Wagener, William P. Inhofer, Kevin L. Siefering | 2001-06-26 |
| 5961732 | Treating substrates by producing and controlling a cryogenic aerosol | John M. Heitzinger | 1999-10-05 |