Issued Patents All Time
Showing 1–14 of 14 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9887107 | Methodologies for rinsing tool surfaces in tools used to process microelectronic workpieces | Mark A. Stiyer | 2018-02-06 |
| 9831107 | Processing system and method for providing a heated etching solution | Kevin L. Siefering, William P. Inhofer | 2017-11-28 |
| 9666456 | Method and apparatus for treating a workpiece with arrays of nozzles | Jimmy D. Collins, Tracy A. Gast, Alan D. Rose | 2017-05-30 |
| 9412628 | Acid treatment strategies useful to fabricate microelectronic devices and precursors thereof | — | 2016-08-09 |
| 9412639 | Method of using separate wafer contacts during wafer processing | Kevin L. Siefering | 2016-08-09 |
| 9263303 | Methodologies for rinsing tool surfaces in tools used to process microelectronic workpieces | Mark A. Stiyer | 2016-02-16 |
| 8978675 | Method and apparatus for treating a workpiece with arrays of nozzles | Jimmy D. Collins, Tracy A. Gast, Alan D. Rose | 2015-03-17 |
| 8967167 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Jimmy D. Collins, Tracy A. Gast, Alan D. Rose | 2015-03-03 |
| 8920577 | Process for treatment of substrates with water vapor or steam | Jeffery W. Butterbaugh, Richard E. Williamson | 2014-12-30 |
| 8668778 | Method of removing liquid from a barrier structure | Jimmy D. Collins, Tracy A. Gast, Alan D. Rose | 2014-03-11 |
| 8387635 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Jimmy D. Collins, Tracy A. Gast, Alan D. Rose | 2013-03-05 |
| 8142571 | Process for treatment of semiconductor wafer using water vapor containing environment | Kurt K. Christenson | 2012-03-27 |
| 7913706 | Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses | Jimmy D. Collins, Tracy A. Gast, Alan D. Rose, Richard E. Williamson | 2011-03-29 |
| 7819984 | Process for treatment of substrates with water vapor or steam | Jeffery W. Butterbaugh, Richard E. Williamson | 2010-10-26 |