Issued Patents All Time
Showing 1–13 of 13 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9666456 | Method and apparatus for treating a workpiece with arrays of nozzles | David DeKraker, Tracy A. Gast, Alan D. Rose | 2017-05-30 |
| 9039840 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Jeffrey M. Lauerhaas, Tracy A. Gast, Alan D. Rose | 2015-05-26 |
| 8978675 | Method and apparatus for treating a workpiece with arrays of nozzles | David DeKraker, Tracy A. Gast, Alan D. Rose | 2015-03-17 |
| 8967167 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | David DeKraker, Tracy A. Gast, Alan D. Rose | 2015-03-03 |
| 8899248 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Samuel A. Cooper, James M. Eppes, Alan D. Rose, Kader Mekias | 2014-12-02 |
| 8684015 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Jeffrey M. Lauerhaas, Tracy A. Gast, Alan D. Rose | 2014-04-01 |
| 8668778 | Method of removing liquid from a barrier structure | David DeKraker, Tracy A. Gast, Alan D. Rose | 2014-03-11 |
| 8656936 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Samuel A. Cooper, James M. Eppes, Alan D. Rose, Kader Mekias | 2014-02-25 |
| 8544483 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | Samuel A. Cooper, James M. Eppes, Alan D. Rose, Kader Mekias | 2013-10-01 |
| 8387635 | Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids | David DeKraker, Tracy A. Gast, Alan D. Rose | 2013-03-05 |
| 8235062 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Jeffrey M. Lauerhaas, Tracy A. Gast, Alan D. Rose | 2012-08-07 |
| 7913706 | Rinsing methodologies for barrier plate and venturi containment systems in tools used to process microelectronic workpieces with one or more treatment fluids, and related apparatuses | David DeKraker, Tracy A. Gast, Alan D. Rose, Richard E. Williamson | 2011-03-29 |
| 5972078 | Exhaust rinse manifold for use with a coating apparatus | Steven G. Tollefson | 1999-10-26 |