Issued Patents All Time
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748788 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Brent Schwab, Chimaobi W. Mbanaso, Gregory P. Thomes, Kevin Rolf | 2020-08-18 |
| 9039840 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Jimmy D. Collins, Tracy A. Gast, Alan D. Rose | 2015-05-26 |
| 8871108 | Process for removing carbon material from substrates | — | 2014-10-28 |
| 8684015 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Jimmy D. Collins, Tracy A. Gast, Alan D. Rose | 2014-04-01 |
| 8235062 | Tools and methods for processing microelectronic workpieces using process chamber designs that easily transition between open and closed modes of operation | Jimmy D. Collins, Tracy A. Gast, Alan D. Rose | 2012-08-07 |
| 7100304 | Megasonic cleaner and dryer | Thomas Nicolosi, Paul Mertens, William Fyen | 2006-09-05 |
| 6928751 | Megasonic cleaner and dryer system | Chad Michael Hosack, Mario E. Bran, Raoul Standt, Paul Patel, Yi Wu +2 more | 2005-08-16 |
| 6754980 | Megasonic cleaner and dryer | Thomas Nicolosi, Paul Mertens, William Fyen | 2004-06-29 |
| 5962132 | Silica nanoparticles obtained from a method involving a direct current electric arc in an oxygen-containing atmosphere | Robert P. H. Chang, Tobin J. Marks, Udo C. Pernisz | 1999-10-05 |
| 5770022 | Method of making silica nanoparticles | Robert P. H. Chang, Tobin J. Marks, Udo C. Pernisz | 1998-06-23 |