Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11355376 | Systems and methods for treating substrates with cryogenic fluid mixtures | Jeffery W. Butterbaugh, David S. Becker | 2022-06-07 |
| 11020774 | Microelectronic treatment system having treatment spray with controllable beam size | — | 2021-06-01 |
| 10991610 | Systems and methods for treating substrates with cryogenic fluid mixtures | Jeffery W. Butterbaugh | 2021-04-27 |
| 10748789 | Systems and methods for treating substrates with cryogenic fluid mixtures | Jeffery W. Butterbaugh, David S. Becker | 2020-08-18 |
| 10748788 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Brent Schwab, Gregory P. Thomes, Kevin Rolf, Jeffrey M. Lauerhaas | 2020-08-18 |
| 10062596 | Systems and methods for treating substrates with cryogenic fluid mixtures | Jeffery W. Butterbaugh, David S. Becker | 2018-08-28 |
| 10020217 | Systems and methods for treating substrates with cryogenic fluid mixtures | Jeffery W. Butterbaugh, David S. Becker | 2018-07-10 |
| 10014191 | Systems and methods for treating substrates with cryogenic fluid mixtures | Jeffery W. Butterbaugh, David S. Becker | 2018-07-03 |