Issued Patents All Time
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10748788 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Chimaobi W. Mbanaso, Gregory P. Thomes, Kevin Rolf, Jeffrey M. Lauerhaas | 2020-08-18 |
| 7425505 | Use of silyating agents | Philip G. Clark, Kurt K. Christenson | 2008-09-16 |
| 6835667 | Method for etching high-k films in solutions comprising dilute fluoride species | Kurt K. Christenson, Thomas J. Wagener, Neil Bruce Rosengren | 2004-12-28 |
| 6663792 | Equipment for UV wafer heating and photochemistry | Robert T. Fayfield | 2003-12-16 |
| 6465374 | Method of surface preparation | Jeffery W. Butterbaugh | 2002-10-15 |
| 6287413 | Apparatus for processing both sides of a microelectronic device precursor | Robert T. Fayfield | 2001-09-11 |
| 6221168 | HF/IPA based process for removing undesired oxides form a substrate | Lawrence E. Carter, Robert T. Fayfield | 2001-04-24 |
| 6165273 | Equipment for UV wafer heating and photochemistry | Robert T. Fayfield | 2000-12-26 |
| 5922219 | UV/halogen treatment for dry oxide etching | Robert T. Fayfield | 1999-07-13 |