Issued Patents All Time
Showing 25 most recent of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 8771427 | Method of manufacturing integrated circuit devices | — | 2014-07-08 |
| 8257505 | Method for megasonic processing of an article | — | 2012-09-04 |
| 7614406 | Method of cleaning substrates utilizing megasonic energy | — | 2009-11-10 |
| 7518288 | System for megasonic processing of an article | — | 2009-04-14 |
| 7287537 | Megasonic probe energy director | — | 2007-10-30 |
| 7268469 | Transducer assembly for megasonic processing of an article and apparatus utilizing the same | — | 2007-09-11 |
| 7211932 | Apparatus for megasonic processing of an article | — | 2007-05-01 |
| 7185661 | Reciprocating megasonic probe | — | 2007-03-06 |
| 7117876 | Method of cleaning a side of a thin flat substrate by applying sonic energy to the opposite side of the substrate | — | 2006-10-10 |
| 6928751 | Megasonic cleaner and dryer system | Chad Michael Hosack, Jeffrey M. Lauerhaas, Raoul Standt, Paul Patel, Yi Wu +2 more | 2005-08-16 |
| 6892738 | Apparatus and methods for reducing damage to substrates during megasonic cleaning processes | Michael B. Olesen, Yi Wu | 2005-05-17 |
| 6684891 | Wafer cleaning | — | 2004-02-03 |
| 6681782 | Wafer cleaning | — | 2004-01-27 |
| 6679272 | Megasonic probe energy attenuator | Michael B. Olesen, Yi Wu | 2004-01-20 |
| 6463938 | Wafer cleaning method | — | 2002-10-15 |
| 6378534 | Semiconductor wafer cleaning system | Michael B. Olesen | 2002-04-30 |
| 6295999 | Wafer cleaning method | — | 2001-10-02 |
| 6158445 | Semiconductor wafer cleaning method | Michael B. Olesen | 2000-12-12 |
| 6140744 | Wafer cleaning system | — | 2000-10-31 |
| 6122837 | Centrifugal wafer processor and method | Michael B. Olesen | 2000-09-26 |
| 6039059 | Wafer cleaning system | — | 2000-03-21 |
| 5996595 | Semiconductor wafer cleaning system | Michael B. Olesen | 1999-12-07 |
| 5950645 | Semiconductor wafer cleaning system | Michael B. Olesen | 1999-09-14 |
| 5908509 | Semiconductor wafer cleaning system | Michael B. Olesen | 1999-06-01 |
| 5656097 | Semiconductor wafer cleaning system | Michael B. Olesen | 1997-08-12 |