Issued Patents All Time
Showing 26–36 of 36 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5556479 | Method and apparatus for drying semiconductor wafers | — | 1996-09-17 |
| 5539995 | Continuous flow vapor dryer system | — | 1996-07-30 |
| 5534076 | Megasonic cleaning system | — | 1996-07-09 |
| 5365960 | Megasonic transducer assembly | — | 1994-11-22 |
| 5286657 | Single wafer megasonic semiconductor wafer processing system | — | 1994-02-15 |
| 5148823 | Single chamber megasonic energy cleaner | — | 1992-09-22 |
| 5090432 | Single wafer megasonic semiconductor wafer processing system | — | 1992-02-25 |
| 5037481 | Megasonic cleaning method | — | 1991-08-06 |
| 4998549 | Megasonic cleaning apparatus | — | 1991-03-12 |
| 4869278 | Megasonic cleaning apparatus | — | 1989-09-26 |
| 4804007 | Cleaning apparatus | — | 1989-02-14 |