| 8899248 |
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Jimmy D. Collins, Samuel A. Cooper, Alan D. Rose, Kader Mekias |
2014-12-02 |
| 8656936 |
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Jimmy D. Collins, Samuel A. Cooper, Alan D. Rose, Kader Mekias |
2014-02-25 |
| 8544483 |
Barrier structure and nozzle device for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Jimmy D. Collins, Samuel A. Cooper, Alan D. Rose, Kader Mekias |
2013-10-01 |
| 7681581 |
Compact duct system incorporating moveable and nestable baffles for use in tools used to process microelectronic workpieces with one or more treatment fluids |
Alan D. Rose, Darian Carr, Stephen Hanson |
2010-03-23 |