Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11545387 | Magnetic integrated lift pin system for a chemical processing chamber | William P. Inhofer, Sean Moore | 2023-01-03 |
| 7134827 | Reduced footprint tool for automated processing of microelectronic substrates | Robert E. Larson, Sean D. Simondet, David C. Zimmerman, Quirin W. Matthys | 2006-11-14 |
| 6979165 | Reduced footprint tool for automated processing of microelectronic substrates | Robert E. Larson, Sean D. Simondet, David C. Zimmerman, Quirin W. Matthys | 2005-12-27 |
| 6845779 | Edge gripping device for handling a set of semiconductor wafers in an immersion processing system | Tim Herbst, Tracy A. Gast, Thomas J. Wagener, Kevin L. Siefering | 2005-01-25 |
| 6135156 | Tubing closure | James Donoho, Eric Soderstrom | 2000-10-24 |
| 5820692 | Vacuum compatible water vapor and rinse process module | James Baecker, D. Scott Becker, Michael J. Foline | 1998-10-13 |