Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6221781 | Combined process chamber with multi-positionable pedestal | Kevin L. Siefering, Scott W. Hamre | 2001-04-24 |
| 5820692 | Vacuum compatible water vapor and rinse process module | James Baecker, D. Scott Becker, Todd Maciej | 1998-10-13 |