Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6221781 | Combined process chamber with multi-positionable pedestal | Kevin L. Siefering, Michael J. Foline | 2001-04-24 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6221781 | Combined process chamber with multi-positionable pedestal | Kevin L. Siefering, Michael J. Foline | 2001-04-24 |