Issued Patents All Time
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5820692 | Vacuum compatible water vapor and rinse process module | James Baecker, Michael J. Foline, Todd Maciej | 1998-10-13 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 5820692 | Vacuum compatible water vapor and rinse process module | James Baecker, Michael J. Foline, Todd Maciej | 1998-10-13 |