Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7134827 | Reduced footprint tool for automated processing of microelectronic substrates | Robert E. Larson, David C. Zimmerman, Todd Maciej, Quirin W. Matthys | 2006-11-14 |
| 6979165 | Reduced footprint tool for automated processing of microelectronic substrates | Robert E. Larson, David C. Zimmerman, Todd Maciej, Quirin W. Matthys | 2005-12-27 |
| 6822413 | Systems and methods incorporating an end effector with a rotatable and/or pivotable body and/or an optical sensor having a light path that extends along a length of the end effector | — | 2004-11-23 |