Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12334348 | Substrate scanning apparatus with pendulum and rotatable substrate holder | Kevin L. Siefering, Matthew C. Gwinn | 2025-06-17 |
| 11476129 | Translating and rotating chuck for processing microelectronic substrates in a process chamber | Edward Hanzlik, Tim Herbst | 2022-10-18 |
| 9564378 | Detection of lost wafer from spinning chuck | Alan D. Rose | 2017-02-07 |