Issued Patents All Time
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11707770 | Pressure control strategies to provide uniform treatment streams in the manufacture of microelectronic devices | Kevin L. Siefering | 2023-07-25 |
| 11476129 | Translating and rotating chuck for processing microelectronic substrates in a process chamber | Michael Gruenhagen, Tim Herbst | 2022-10-18 |
| 11241720 | Pressure control strategies to provide uniform treatment streams in the manufacture of microelectronic devices | Kevin L. Siefering | 2022-02-08 |
| 10625280 | Apparatus for spraying cryogenic fluids | Brian D. Hansen | 2020-04-21 |
| 10418270 | Wafer edge lift pin design for manufacturing a semiconductor device | Sean Moore, Brian D. Hansen | 2019-09-17 |
| 10020207 | Apparatus and method for scanning an object through a fluid stream | Mark Goluch, David C. Zimmerman, Robert E. Larson, Gregory P. Thomes, Christina Ann Rathman | 2018-07-10 |
| 9321087 | Apparatus and method for scanning an object through a fluid spray | Mark Goluch, David C. Zimmerman, Robert E. Larson, Gregory P. Thomes, Christina Ann Rathman | 2016-04-26 |
| 7422031 | Rotary unions, fluid delivery systems, and related methods | Arne Benson | 2008-09-09 |