Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7556697 | System and method for carrying out liquid and subsequent drying treatments on one or more wafers | Erik Olson, Douglas S. Spaeth | 2009-07-07 |
| 7422031 | Rotary unions, fluid delivery systems, and related methods | Edward Hanzlik | 2008-09-09 |
| 6807984 | High flow high control valve and assembly | Michael Volovets | 2004-10-26 |