Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11207715 | System and method for monitoring treatment of microelectronic substrates with fluid sprays such as cryogenic fluid sprays | Jeffery W. Butterbaugh, Alan D. Rose | 2021-12-28 |
| 10020207 | Apparatus and method for scanning an object through a fluid stream | Mark Goluch, David C. Zimmerman, Robert E. Larson, Edward Hanzlik, Gregory P. Thomes | 2018-07-10 |
| 9321087 | Apparatus and method for scanning an object through a fluid spray | Mark Goluch, David C. Zimmerman, Robert E. Larson, Edward Hanzlik, Gregory P. Thomes | 2016-04-26 |
| 7156927 | Transition flow treatment process and apparatus | Kurt K. Christenson, Nam Pyo Lee, Gary William Michalko | 2007-01-02 |
| 6875289 | Semiconductor wafer cleaning systems and methods | Kurt K. Christenson | 2005-04-05 |