Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7530880 | Method and apparatus for improved chemical mechanical planarization pad with pressure control and process monitor | Rajeev Bajaj, Bang Nguyen | 2009-05-12 |
| 6681781 | Methods for cleaning microelectronic substrates using ultradilute cleaning liquids | Suraj Puri, Joseph Medeiros, Jr., David S. Becker | 2004-01-27 |
| 5810942 | Aerodynamic aerosol chamber | Thomas J. Wagener, Kevin L. Siefering, William A. Cavaliere | 1998-09-22 |