Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9691628 | Process for silicon nitride removal selective to SiGex | Jeffery W. Butterbaugh | 2017-06-27 |
| 9299570 | Process for silicon nitride removal selective to SiGex | Jeffery W. Butterbaugh | 2016-03-29 |
| 9059104 | Process for selectively removing nitride from substrates | Jeffery W. Butterbaugh, David S. Becker | 2015-06-16 |