Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 7413959 | Semiconductor device including a planarized surface and method thereof | Jae-Dong Lee, Chang-Ki Hong | 2008-08-19 |
| 7237561 | Apparatus for cleaning semiconductor wafer including heating using a light source and method for cleaning wafer using the same | Im-Soo Park, Kun-Tack Lee, Sang-rok Hah | 2007-07-03 |
| 7230293 | Storage nodes of a semiconductor memory | Sang-Yong Kim, Kun-Tack Lee | 2007-06-12 |
| 7153370 | Method of cleaning semiconductor wafer | Kun-Tack Lee, Sang-rok Hah | 2006-12-26 |
| 6903024 | Method of manufacturing storage nodes of a semiconductor memory device using a two-step etching process | Sang-Yong Kim, Kun-Tack Lee | 2005-06-07 |
| 6887137 | Chemical mechanical polishing slurry and chemical mechanical polishing method using the same | Jae-Dong Lee, Bo-Un Yoon | 2005-05-03 |
| 6860277 | Single type of semiconductor wafer cleaning device | Kun-Tack Lee, Sang-rok Hah | 2005-03-01 |
| 6740247 | HF vapor phase wafer cleaning and oxide etching | Herbert H. Sawin | 2004-05-25 |
| 6712078 | Apparatus for cleaning semiconductor wafer and method for cleaning wafer using the same | Im-Soo Park, Kun-Tack Lee, Sang-rok Hah | 2004-03-30 |
| 6447983 | Smart photolithography | Young Rag Do, Joon-bae Lee | 2002-09-10 |
| 6107166 | Vapor phase cleaning of alkali and alkaline earth metals | Jeffery W. Butterbaugh, Herbert H. Sawin, Zhe Zhang | 2000-08-22 |