Issued Patents All Time
Showing 1–25 of 95 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10150890 | CMP slurry composition for polishing copper and polishing method using the same | Jeong Hwan Jeong, Young Chul Jung, Dong-Hun Kang, Tae Wan Kim, Jong Il Noh | 2018-12-11 |
| 9754806 | Apparatus for treating wafers using supercritical fluid | Hyo-San Lee, Kun-Tack Lee, Jeong-Nam Han | 2017-09-05 |
| 9593260 | CMP slurry composition for polishing copper, and polishing method using same | Jong Il Noh, Dong-Hun Kang, Tae Wan Kim, Jeong Hwan Jeong, Young Nam Choi | 2017-03-14 |
| 9123660 | Chemical mechanical polishing slurry compositions and polishing method using the same | Tai Young Kim, Byoung-ho Choi, Hyung-Soo Kim | 2015-09-01 |
| 9035396 | Semiconductor device including dummy gate part and method of fabricating the same | Byoung-ho Kwon, Sang-youn Jo, Jin-sook Choi, Bo-Un Yoon, Hong-Soo Kim +1 more | 2015-05-19 |
| 8951383 | Apparatus for treating wafers using supercritical fluid | Hyo-San Lee, Kun-Tack Lee, Jeong-Nam Han | 2015-02-10 |
| 8790470 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2014-07-29 |
| 8685272 | Composition for etching silicon oxide layer, method for etching semiconductor device using the same, and composition for etching semiconductor device | Go-Un Kim, Hyo-San Lee, Myung Kook Park, Ho-Seok Yang, Jeong-Nam Han | 2014-04-01 |
| 8637942 | Transistor having a metal nitride layer pattern, etchant and methods of forming the same | Sang-Yong Kim, Ji-Hoon Cha, Woo-Gwan Shim, Sang-jun Choi | 2014-01-28 |
| 8585917 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2013-11-19 |
| 8357613 | Methods of fabricating semiconductor devices and semiconductor devices including a contact plug processed by rapid thermal annealing | Suk-Hun Choi, Jae-Hyoung Choi, Yoon-Ho Son, Min-Young Park, Yong-Suk Tak | 2013-01-22 |
| 8338300 | Slurry composition for chemical-mechanical polishing and method of chemical-mechanical polishing with the same | Jong Won Lee, Sang-Yeob Han | 2012-12-25 |
| 8241988 | Photo key and method of fabricating semiconductor device using the photo key | Byoung-ho Kwon, Bo-Un Yoon, Jae-Dong Lee, Sang Jin Kim | 2012-08-14 |
| 8148710 | Phase-change memory device using a variable resistance structure | Suk-Hun Choi, Yoon-Ho Son, Jang-Eun Heo | 2012-04-03 |
| 8124526 | Methods of forming a thin ferroelectric layer and methods of manufacturing a semiconductor device including the same | Suk-Hun Choi, Jong Won Lee, Bo-Un Yoon | 2012-02-28 |
| 8110499 | Method of forming a contact structure | Dae-Hyuk Kang, Young-Hoo Kim, Kun-Tack Lee, Jae-Dong Lee, Dae-Hong Eom +1 more | 2012-02-07 |
| 8092698 | Methods of forming semiconductor devices formed by processes including the use of specific etchant solutions | Yu-Kyung Kim, Sang-jun Choi, Jeong-Nam Han | 2012-01-10 |
| 8084344 | Methods of fabricating a semiconductor device | Jong Won Lee, Sang-Yeob Han, Bo-Un Yoon, Jae-Dong Lee | 2011-12-27 |
| 8084367 | Etching, cleaning and drying methods using supercritical fluid and chamber systems using these methods | Hyo-San Lee, Kun-Tack Lee, Woo-Gwan Shim, Jeong-Nam Han, Jung-Min Oh +4 more | 2011-12-27 |
| 8053845 | Semiconductor device including dummy gate part and method of fabricating the same | Byoung-ho Kwon, Sang-youn Jo, Jin-sook Choi, Bo-Un Yoon, Hong-Soo Kim +1 more | 2011-11-08 |
| 8048808 | Slurry compositions for polishing metal, methods of polishing a metal object and methods of forming a metal wiring using the same | Jong Won Lee, Sang-Yeob Han, Bo-Un Yoon, Jae-Dong Lee | 2011-11-01 |
| 8043970 | Slurry compositions for selectively polishing silicon nitride relative to silicon oxide, methods of polishing a silicon nitride layer and methods of manufacturing a semiconductor device using the same | Jong Won Lee, Sang-Yeob Han, Jae-Dong Lee | 2011-10-25 |
| 8038508 | Apparatus for polishing a wafer and method for detecting a polishing end point by the same | Jong-Heun Lim, Sung-Ho Shin, Bo-Un Yoon | 2011-10-18 |
| 8034705 | Method of forming a seam-free tungsten plug | Suk-Hun Choi, Yoon-Ho Son, Ju-Young Jung | 2011-10-11 |
| 8030150 | Method of fabricating non-volatile memory integrated circuit device and non-volatile memory integrated circuit device fabricated using the same | Byoung-ho Kwon, Bo-Un Yoon, Jun Yong Kim | 2011-10-04 |