Issued Patents All Time
Showing 25 most recent of 30 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12362204 | Method of manufacturing semiconductor device using stationary laser module | Jinwoo Lee, Seok Hoon Kim, In-Gi Kim, Seung Min Shin, Yong-Jun Choi | 2025-07-15 |
| 12100602 | Wet etching apparatus | Jin Woo Lee, Yong-Jun Choi, Seok Hoon Kim, Seung Min Shin | 2024-09-24 |
| 12042828 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim +3 more | 2024-07-23 |
| 11742221 | Dry cleaning apparatus and dry cleaning method | Seung Min Shin, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-08-29 |
| 11721565 | Multi-chamber apparatus | Yong-Jun Choi, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Sung Hyun Park +4 more | 2023-08-08 |
| 11648594 | Wafer cleaning apparatus and wafer cleaning method using the same | Seung Min Shin, Hun Jae Jang, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim +3 more | 2023-05-16 |
| 11631599 | Semiconductor device manufacturing apparatus including laser module | Jinwoo Lee, Seok Hoon Kim, In-Gi Kim, Seung Min Shin, Yong-Jun Choi | 2023-04-18 |
| 11605545 | Wafer cleaning equipment | Hun Jae Jang, Seung Min Shin, Seok Hoon Kim, In-Gi Kim, Tae Hong Kim +3 more | 2023-03-14 |
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Kuntack Lee, Yong-Jhin Cho, Chawon Koh, Sunghyun Park +2 more | 2021-11-30 |
| 11087996 | Dry cleaning apparatus and dry cleaning method | Seung Min Shin, Seok Hoon Kim, Young-Hoo Kim, In-Gi Kim, Tae Hong Kim +3 more | 2021-08-10 |
| 10424503 | Methods of fabricating semiconductor devices including fin-shaped active regions | Young-Sang Youn, Myung Geun Song, Jae-Jik Baek, Bo-Un Yoon, Jeong-Nam Han | 2019-09-24 |
| 10090190 | Methods of fabricating semiconductor devices including fin-shaped active regions | Young-Sang Youn, Myung Geun Song, Jae-Jik Baek, Bo-Un Yoon, Jeong-Nam Han | 2018-10-02 |
| 9972683 | Semiconductor device and method of fabricating the same | Dong-Kwon Kim | 2018-05-15 |
| 9865597 | Semiconductor device having fin and dual liner | Sang-Woo Lee | 2018-01-09 |
| 9735156 | Semiconductor device and a fabricating method thereof | — | 2017-08-15 |
| 9728535 | Methods of fabricating semiconductor devices including fin-shaped active regions | Young-Sang Youn, Myung Geun Song, Jae-Jik Baek, Bo-Un Yoon, Jeong-Nam Han | 2017-08-08 |
| 9627514 | Semiconductor device and method of fabricating the same | Dong-Kwon Kim | 2017-04-18 |
| 9613811 | Methods of manufacturing semiconductor devices | Jae-Jik Baek, Sang-Jine Park, Bo-Un Yoon, Young-Sang Youn, Ji-Min Jeong | 2017-04-04 |
| 9461148 | Semiconductor device and method of fabricating the same | Jae Young Park, Jae-Jik Baek, Bon-Young Koo, Kang Hun Moon, Bo-Un Yoon | 2016-10-04 |
| 9305825 | Methods of fabricating semiconductor devices including fin-shaped active regions | Young-Sang Youn, Myung Geun Song, Jae-Jik Baek, Bo-Un Yoon, Jeong-Nam Han | 2016-04-05 |
| 9136135 | Method of fabricating semiconductor device | Jae-Jik Baek, Bo-Un Yoon, Kwang-Wook Lee, Jeong-Nam Han | 2015-09-15 |
| 9040415 | Semiconductor device and method of fabricating the same | Sang-Jine Park, Bo-Un Yoon, Young-Sang Youn, Jeong-Nam Han, Kee-Sang Kwon +2 more | 2015-05-26 |
| 8766343 | Integrated circuit capacitors having sidewall supports | Dae-Hyuk Kang, Bo-Un Yoon, Kun-Tack Lee, Woo-Gwan Shim, Im-Soo Park +3 more | 2014-07-01 |
| 8637942 | Transistor having a metal nitride layer pattern, etchant and methods of forming the same | Sang-Yong Kim, Woo-Gwan Shim, Chang-Ki Hong, Sang-jun Choi | 2014-01-28 |
| 8349200 | Method of fine patterning semiconductor device | Shi-Yong Yi, Myeong-Cheol Kim, Dong Ki Yoon, Kyung-yub Jeon | 2013-01-08 |