Issued Patents All Time
Showing 1–21 of 21 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12110593 | Apparatus for fabricating semiconductor device having upper and lower inlets for supplying supercritical fluids and method of fabricating semiconductor device using the same | Young Tae Kim | 2024-10-08 |
| 11887868 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yeon-Jin Gil, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2024-01-30 |
| 11742222 | Apparatus for removing a photoresist and apparatus for manufacturing a comiconductor device | Jihun Cheon, Hyun-Jung Lee, Pyojin Jeon, Wonjun Lee | 2023-08-29 |
| 11610788 | Process chamber and substrate processing apparatus including the same | Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh, Kuntack Lee +1 more | 2023-03-21 |
| 11545373 | Apparatus for removing a photoresist and apparatus for manufacturing a semiconductor device | Jihun Cheon, Hyun-Jung Lee, Pyojin Jeon, Wonjun Lee | 2023-01-03 |
| 11189503 | Substrate drying method, photoresist developing method, photolithography method including the same, and substrate drying system | Young-Hoo Kim, Kuntack Lee, Chawon Koh, Sunghyun Park, Hyosan Lee +2 more | 2021-11-30 |
| 10991600 | Process chamber and substrate processing apparatus including the same | Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Jung-Min Oh, Kuntack Lee +1 more | 2021-04-27 |
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yeon-Jin Gil, Ji Hoon Jeong, Byung-Kwon Cho +2 more | 2021-04-20 |
| 10825698 | Substrate drying apparatus, facility of manufacturing semiconductor device, and method of drying substrate | Young-Hoo Kim, Jihoon Jeong, Yungjun Kim, Kuntack Lee | 2020-11-03 |
| 10818522 | Process chamber for a supercritical process and apparatus for treating substrates having the same | Sang-Jine Park, Byung-Kwon Cho, Yong-Sun Ko, Yeon-Jin Gil, Kwang-Wook Lee | 2020-10-27 |
| 10435234 | Chemical liquid supply apparatus and semiconductor processing apparatus having the same | In Kwang Bae, Jung-Min Oh, Mi Hyun Park, Kun-Tack Lee, Yong-Jun Choi | 2019-10-08 |
| 10361100 | Apparatus and methods for treating a substrate | Hyosan Lee, Yongsun Ko, Kyoungseob Kim, Kwangsu Kim, Seokhoon Kim +2 more | 2019-07-23 |
| 9941110 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Hyosan Lee, Yongsun Ko, Kyoungseob Kim, Seokhoon Kim +2 more | 2018-04-10 |
| 9934959 | Method and apparatus for purifying cleaning agent | Jung-Min Oh, Yongmyung Jun, Yongsun Ko, Kuntack Lee, Hyosan Lee | 2018-04-03 |
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Myung Jun, Yong-Sun Ko, Kun-Tack Lee, Il-Sang Lee, Ji Hoon Jeong +1 more | 2018-02-27 |
| 9627233 | Substrate treating apparatus | Seokhoon Kim, Yongmyung Jun, Yongsun Ko, Kyoungseob Kim, Jung-Min Oh +2 more | 2017-04-18 |
| 9534839 | Apparatus and methods for treating a substrate | Hyosan Lee, Yongsun Ko, Kyongseob Kim, Kwangsu Kim, Seokhoon Kim +2 more | 2017-01-03 |
| 9524864 | Manufacturing method and fluid supply system for treating substrate | Jung-Min Oh, Hyosan Lee, Yongsun Ko, Kyoungseob Kim, Seokhoon Kim +2 more | 2016-12-20 |
| 9394509 | Cleaning solution composition and method of cleaning semiconductor device using the same | Sang Won Bae, Yong-Sun Ko, Seok Hoon Kim, In-Gi Kim, Jung-Min Oh +3 more | 2016-07-19 |
| 9027576 | Substrate treatment systems using supercritical fluid | Yongsun Ko, Kyoungseob Kim, Kwangsu Kim, Seokhoon Kim, Jung-Min Oh +3 more | 2015-05-12 |
| 8795541 | Substrate processing method and substrate processing system for performing the same | Kun-Tack Lee, Hyo-San Lee, Young-Hoo Kim, Jung Won Lee, Sang Won Bae +1 more | 2014-08-05 |