Issued Patents All Time
Showing 1–25 of 62 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412767 | Apparatus for treating substrate and method for treating substrate | Gui Su PARK, Jun Young Choi, Young Jin Jang, Kyu-hwan Chang, Jun Hyun LIM | 2025-09-09 |
| 12272543 | Apparatus for treating substrate and method for treating substrate | Yong Hyun Choi, Young-Hun Lee, Seung Hoon Oh, Mi So PARK, Tae Jong Choi +1 more | 2025-04-08 |
| 11887868 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong +2 more | 2024-01-30 |
| 11664243 | Substrate processing apparatus | Sang-Jine Park, Seung Ho Lee, Bo-Wo Choi, Woo-Gwan Shim | 2023-05-30 |
| 11361960 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Jeong-Yong Bae, Woo Young Kim, Hyun-Jung Lee, Se Jin Park +3 more | 2022-06-14 |
| 11329053 | Semiconductor devices including enlarged contact hole and methods of forming the same | Yoon-Ho Son, Jae Uk Shin, Im-Soo Park, Sung-Yoon Chung | 2022-05-10 |
| 10985036 | Substrate processing apparatus and apparatus for manufacturing integrated circuit device | Young-Hoo Kim, Sang-Jine Park, Yong-Jhin Cho, Yeon-Jin Gil, Ji Hoon Jeong +2 more | 2021-04-20 |
| 10916549 | Semiconductor devices including enlarged contact hole and methods of forming the same | Yoon-Ho Son, Jae Uk Shin, Im-Soo Park, Sung-Yoon Chung | 2021-02-09 |
| 10910237 | Operating method for wet etching system and related system | Sang Hoon Jeong, Dong Ha Kim, Tae Heon Kim, Chang-Sup Mun, Woo-Gwan Shim +2 more | 2021-02-02 |
| 10818522 | Process chamber for a supercritical process and apparatus for treating substrates having the same | Sang-Jine Park, Byung-Kwon Cho, Yong-Jhin Cho, Yeon-Jin Gil, Kwang-Wook Lee | 2020-10-27 |
| 10795263 | Compositions for removing photoresist | Jung-Min Oh, Mi Hyun Park, Hyo-San Lee, Ji Hoon Jeong, In-Gi Kim +4 more | 2020-10-06 |
| 10707071 | Substrate processing apparatus and substrate processing system including the same | Won Ho JANG, Hyun-Jung Lee, Se Jin Park, Dong-Gyun Han, Woo-Gwan Shim +3 more | 2020-07-07 |
| 10576582 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Chang-Gil Ryu, Kun-Tack Lee, Hyo-San Lee | 2020-03-03 |
| 10438891 | Integrated circuit device | Sang-Jine Park, Kee-Sang Kwon, Jae-Jik Baek, Kwang-Wook Lee | 2019-10-08 |
| 10438799 | Methods of fabricating semiconductor devices including support patterns | Sang-Jine Park, In-Seak Hwang | 2019-10-08 |
| 10418366 | Semiconductor devices including enlarged contact hole and methods of forming the same | Yoon-Ho Son, Jae Uk Shin, Im-Soo Park, Sung-Yoon Chung | 2019-09-17 |
| 10029332 | Spot heater and device for cleaning wafer using the same | Young-Hoo Kim, Il-Sang Lee, Chang-Gil Ryu, Kun-Tack Lee, Hyo-San Lee | 2018-07-24 |
| 10025192 | Methods of manufacturing semiconductor devices using a composition for removing photoresist and methods of removing photoresist from a semiconductor substrate | Jung-Min Oh, Mi Hyun Park, Hyo-San Lee, Ji Hoon Jeong, In-Gi Kim +4 more | 2018-07-17 |
| 9985106 | Semiconductor devices utilizing spacer structures | Sang-Jine Park, In-Seak Hwang | 2018-05-29 |
| 9903651 | Sealing member and substrate processing apparatus including the same | Yong-Myung Jun, Kun-Tack Lee, Il-Sang Lee, Ji Hoon Jeong, Yong-Jhin Cho +1 more | 2018-02-27 |
| 9394509 | Cleaning solution composition and method of cleaning semiconductor device using the same | Sang Won Bae, Seok Hoon Kim, In-Gi Kim, Jung-Min Oh, Kun-Tack Lee +3 more | 2016-07-19 |
| 8592315 | Chemical mechanical polishing method | Dong Keun Kim, Chung-Ki Min, Kyung-Hyun Kim | 2013-11-26 |
| 8084801 | Cell structure for a semiconductor memory device and method of fabricating the same | Kyoung-Yun Baek, Hak Kim, Yong-Kug Bae | 2011-12-27 |
| 8053751 | Phase-change semiconductor device and methods of manufacturing the same | Tae Won Kim, Ki-Jong Park, Kyung-Hyun Kim | 2011-11-08 |
| 8048809 | Polishing method using chemical mechanical slurry composition | Hyo Jin Lee, Kyung-Hyun Kim | 2011-11-01 |