Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412767 | Apparatus for treating substrate and method for treating substrate | Gui Su PARK, Jun Young Choi, Young Jin Jang, Yong-Sun Ko, Jun Hyun LIM | 2025-09-09 |
| 12237180 | Apparatus for treating substrate | Jun Young Choi | 2025-02-25 |
| 6638855 | Method of filling contact hole of semiconductor device | Yong-Sun Ko, Chang-Lyong Song, Seung-pil Chong | 2003-10-28 |
| 6607654 | Copper-plating elecrolyte containing polyvinylpyrrolidone and method for forming a copper interconnect | Sun Jung Lee, Hyeon-Deok Lee | 2003-08-19 |
| 6537876 | Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process | Seung-Pil Chung, Young Min Kwon, Sang-lock Hah | 2003-03-25 |
| 6513538 | Method of removing contaminants from integrated circuit substrates using cleaning solutions | Seung-Pil Chung, Young Min Kwon, Sang-lock Hah | 2003-02-04 |
| 6335287 | Method of forming trench isolation regions | Hong-kyu Hwang, Bo-Un Yoon, Sang-rok Hah | 2002-01-01 |
| 6277204 | Methods for cleaning wafers used in integrated circuit devices | Jae-inh Song, Heung-Soo Park, Young-bum Koh | 2001-08-21 |
| 6162671 | Method of forming capacitors having high dielectric constant material | Moon Hee Lee, Jae-inh Song, Chang-Lyong Song | 2000-12-19 |
| 6092539 | In-situ cleaning apparatuses for wafers used in integrated circuit devices and methods of cleaning using the same | Jae-inh Song, Heung-Soo Park, Young-bum Koh | 2000-07-25 |
| 5624498 | Showerhead for a gas supplying apparatus | Gil-Gwang Lee, Kazuyuki Fujihara | 1997-04-29 |