Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12412767 | Apparatus for treating substrate and method for treating substrate | Jun Young Choi, Young Jin Jang, Yong-Sun Ko, Kyu-hwan Chang, Jun Hyun LIM | 2025-09-09 |
| 12278121 | Support unit, substrate treating apparatus including the same, and substrate treating method | Kangseop Yun, Seung Hoon Oh, Ye Jin Choi, Youngil Lee, Byungsun Bang +1 more | 2025-04-15 |
| 11869778 | Liquid supply unit, and apparatus and method for processing substrate | Seungtae YANG, Gi Hun CHOI, Buyoung Jung | 2024-01-09 |
| 11794220 | Fluid supply unit and substrate treating apparatus having the same | Inhwang PARK, Young-Hun Lee, Youngseop Choi, Seung Hoon Oh, Jonghyeon Woo +1 more | 2023-10-24 |
| 11765793 | Substrate treating apparatus | Muhyeon Lee, Byungsun Bang, Jungbong Choi, Youngil Lee, Kangseop Yun +3 more | 2023-09-19 |
| 11721575 | Substrate support unit and substrate treating apparatus having the same | Inhwang PARK, Young-Hun Lee, Youngseop Choi, Seung Hoon Oh, Jonghyeon Woo +1 more | 2023-08-08 |
| 11594421 | Substrate treating apparatus and substrate treating method | Youngil Lee, Jungbong Choi, Seungho Lee, Gil Hun Song, Seung Hoon Oh +1 more | 2023-02-28 |
| 11232942 | Substrate treating method and substrate treating apparatus | Seungtae YANG, Buyoung Jung, Jae Hong Lee, Ho-Young Kim, Yunsuk Jeung | 2022-01-25 |
| 10825699 | Standby port and substrate processing apparatus having the same | Buyoung Jung, Jonghan Kim, Young Jin Jang, Jin Tack Yu, Youngjun Choi +5 more | 2020-11-03 |
| 10283390 | Apparatus for processing substrate | Daehun Kim | 2019-05-07 |
| 8673110 | Solution supplying unit and substrate treating apparatus having the same | Hwan-lk Noh, Byung Chul Kang, Won-Pil Cho | 2014-03-18 |