Issued Patents All Time
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11794220 | Fluid supply unit and substrate treating apparatus having the same | Inhwang PARK, Gui Su PARK, Young-Hun Lee, Youngseop Choi, Seung Hoon Oh +1 more | 2023-10-24 |
| 11721575 | Substrate support unit and substrate treating apparatus having the same | Inhwang PARK, Gui Su PARK, Young-Hun Lee, Youngseop Choi, Seung Hoon Oh +1 more | 2023-08-08 |
| 10825699 | Standby port and substrate processing apparatus having the same | Buyoung Jung, Jonghan Kim, Young Jin Jang, Jin Tack Yu, Youngjun Choi +5 more | 2020-11-03 |