Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11869778 | Liquid supply unit, and apparatus and method for processing substrate | Seungtae YANG, Gi Hun CHOI, Gui Su PARK | 2024-01-09 |
| 11794219 | Liquid supply unit and substrate treating apparatus and method | Seungtae YANG, Seung-Hwan Cho | 2023-10-24 |
| 11658048 | Unit for supplying liquid, apparatus and method for treating substrate having the unit | Seong-soo Lee, Gi Hun CHOI, Myung A JEON, Soo Young Park | 2023-05-23 |
| 11232942 | Substrate treating method and substrate treating apparatus | Seungtae YANG, Gui Su PARK, Jae Hong Lee, Ho-Young Kim, Yunsuk Jeung | 2022-01-25 |
| 10825699 | Standby port and substrate processing apparatus having the same | Jonghan Kim, Young Jin Jang, Jin Tack Yu, Youngjun Choi, Daehun Kim +5 more | 2020-11-03 |
| 10699918 | Chemical supply unit and apparatus for treating a substrate | Jin Tack Yu, Gil Hun Song, Sun-Yong Park | 2020-06-30 |