Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198950 | Apparatus and method for processing substrate | Muhyeon Lee, Sul Lee | 2025-01-14 |
| 12134113 | Substrate processing apparatus including nozzle unit and substrate processing method | Ju Hwan LEE, Hyeon Jun Lee, So Young PARK | 2024-11-05 |
| 11664212 | Substrate treating apparatus and liquid supplying method | Yong Hoon HONG, Sul Lee, Moonsik Choi, Young-Su Kim | 2023-05-30 |
| 11658048 | Unit for supplying liquid, apparatus and method for treating substrate having the unit | Seong-soo Lee, Buyoung Jung, Gi Hun CHOI, Soo Young Park | 2023-05-23 |