Issued Patents All Time
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12040216 | Substrate supporting member, substrate treating apparatus including the same and substrate treating method thereof | Kang Suk Lee, Hyeon Jun Lee, So Young Jang | 2024-07-16 |
| 11981995 | Chemical supply apparatus, method for removing particles from chemical, nozzle unit, and substrate treating apparatus | Dohyeon YOON, Heehwan Kim, Ji-Young Lee, Young-Su Kim | 2024-05-14 |
| 11664212 | Substrate treating apparatus and liquid supplying method | Sul Lee, Myung A JEON, Moonsik Choi, Young-Su Kim | 2023-05-30 |
| 11424139 | Apparatus and method for treating substrate, and nozzle unit | Heehwan Kim, Ji-Young Lee | 2022-08-23 |