Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11511321 | Substrate processing method and substrate processing apparatus | Young Jin Kim, Bu Young JUNG, Byung Sun BANG, Seung Hoon Oh, Young-Jun Choi +1 more | 2022-11-29 |
| 11361962 | Method and apparatus for processing substrate | Seung Hoon Oh, Bu Young JUNG, Byung Sun BANG, Young Jin Kim, Young-Jun Choi +1 more | 2022-06-14 |
| 10825699 | Standby port and substrate processing apparatus having the same | Buyoung Jung, Jonghan Kim, Young Jin Jang, Youngjun Choi, Daehun Kim +5 more | 2020-11-03 |
| 10758875 | Liquid supply unit, substrate treating apparatus, and method for removing bubbles | Byungsun Bang, Youngjun Choi, Jonghan Kim, Young Jin Jang | 2020-09-01 |
| 10699918 | Chemical supply unit and apparatus for treating a substrate | Buyoung Jung, Gil Hun Song, Sun-Yong Park | 2020-06-30 |