Issued Patents All Time
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278121 | Support unit, substrate treating apparatus including the same, and substrate treating method | Kangseop Yun, Seung Hoon Oh, Ye Jin Choi, Youngil Lee, Jungbong Choi +1 more | 2025-04-15 |
| 11765793 | Substrate treating apparatus | Muhyeon Lee, Gui Su PARK, Jungbong Choi, Youngil Lee, Kangseop Yun +3 more | 2023-09-19 |
| 11745291 | Apparatus and method for processing substrate | Ohyeol Kwon, Jun Keon Ahn | 2023-09-05 |
| 11000879 | Method and apparatus for treating substrate | — | 2021-05-11 |
| 10825699 | Standby port and substrate processing apparatus having the same | Buyoung Jung, Jonghan Kim, Young Jin Jang, Jin Tack Yu, Youngjun Choi +5 more | 2020-11-03 |
| 10758875 | Liquid supply unit, substrate treating apparatus, and method for removing bubbles | Jin Tack Yu, Youngjun Choi, Jonghan Kim, Young Jin Jang | 2020-09-01 |
| 10453672 | Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate | Junhee Youn, Kilsung KWON | 2019-10-22 |