Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12278121 | Support unit, substrate treating apparatus including the same, and substrate treating method | Kangseop Yun, Seung Hoon Oh, Ye Jin Choi, Youngil Lee, Byungsun Bang +1 more | 2025-04-15 |
| 11961748 | Support unit and substrate treating apparatus including the same | Kangseop Yun, Youngil Lee | 2024-04-16 |
| 11765793 | Substrate treating apparatus | Muhyeon Lee, Gui Su PARK, Byungsun Bang, Youngil Lee, Kangseop Yun +3 more | 2023-09-19 |
| 11682577 | Spin head, apparatus and method for treating a substrate including the spin head | Jihwan LEE, Chan Young Heo, Pil Kyun HEO | 2023-06-20 |
| 11594421 | Substrate treating apparatus and substrate treating method | Youngil Lee, Seungho Lee, Gui Su PARK, Gil Hun Song, Seung Hoon Oh +1 more | 2023-02-28 |