Issued Patents All Time
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12308257 | Wafer treatment apparatus and method for reducing scattering of treatment liquid | Young Jin Kim, Eunhyeok Choi | 2025-05-20 |
| 12278121 | Support unit, substrate treating apparatus including the same, and substrate treating method | Kangseop Yun, Seung Hoon Oh, Youngil Lee, Byungsun Bang, Jungbong Choi +1 more | 2025-04-15 |
| 11845113 | Unit for recycling treating liquid of substrate and apparatus for treating substrate with the unit | Byung Sun BANG, Tae Ho KANG, Jong Won Moon | 2023-12-19 |
| 11798822 | Support unit, substrate treating apparatus including the same, and substrate treating method | Daehun Kim, Kangseop Yun | 2023-10-24 |
| 11765793 | Substrate treating apparatus | Muhyeon Lee, Gui Su PARK, Byungsun Bang, Jungbong Choi, Youngil Lee +3 more | 2023-09-19 |