Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 11845113 | Unit for recycling treating liquid of substrate and apparatus for treating substrate with the unit | Ye Jin Choi, Tae Ho KANG, Jong Won Moon | 2023-12-19 |
| 11511321 | Substrate processing method and substrate processing apparatus | Young Jin Kim, Jin Tack Yu, Bu Young JUNG, Seung Hoon Oh, Young-Jun Choi +1 more | 2022-11-29 |
| 11361962 | Method and apparatus for processing substrate | Seung Hoon Oh, Jin Tack Yu, Bu Young JUNG, Young Jin Kim, Young-Jun Choi +1 more | 2022-06-14 |