Issued Patents All Time
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266546 | Unit for supplying liquid, apparatus and method for treating substrate with the unit | Do Gyeong Ha, Tae Suk YUN, Moon Soon Choi, Gu Yeol AN, Chae-young Lim | 2025-04-01 |
| 11511321 | Substrate processing method and substrate processing apparatus | Young Jin Kim, Jin Tack Yu, Byung Sun BANG, Seung Hoon Oh, Young-Jun Choi +1 more | 2022-11-29 |
| 11361962 | Method and apparatus for processing substrate | Seung Hoon Oh, Jin Tack Yu, Byung Sun BANG, Young Jin Kim, Young-Jun Choi +1 more | 2022-06-14 |