Issued Patents All Time
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12266546 | Unit for supplying liquid, apparatus and method for treating substrate with the unit | Do Gyeong Ha, Moon Soon Choi, Gu Yeol AN, Chae-young Lim, Bu Young JUNG | 2025-04-01 |
| 11684955 | Chemical supply unit, substrate processing apparatus, and substrate processing method | Hyeon Suk PARK | 2023-06-27 |