| 11890639 |
Apparatus for treating substrate |
Kihoon Choi, Ki-Moon Kang, Do Heon Kim, Jaeseong Lee |
2024-02-06 |
| 11887866 |
Supercritical processing apparatus |
Jae Seong LEE, Hae-Won Choi, Ki Hoon CHOI, Anton Koriakin, Do Heon Kim +1 more |
2024-01-30 |
| 11682577 |
Spin head, apparatus and method for treating a substrate including the spin head |
Jihwan LEE, Jungbong Choi, Pil Kyun HEO |
2023-06-20 |
| 11621159 |
Method for treating substrate |
Do Heon Kim, Kihoon Choi, Ki-Moon Kang |
2023-04-04 |
| 11530375 |
Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus |
Hae-Won Choi, Kihoon Choi, Jaeseong Lee, Anton Koriakin, Do Heon Kim +1 more |
2022-12-20 |
| 11410862 |
Apparatus for processing substrate including cooling member closer to central axis than heating member |
Jaeseong Lee, Kihoon Choi, Hae-Won Choi, Anton Koriakin, Do Heon Kim +1 more |
2022-08-09 |
| 11004675 |
Substrate cleaning composition, substrate treating method, and substrate treating apparatus |
Hae-Won Choi, Ki-Moon Kang, Kihoon Choi, Anton Koriakin, Jaeseong Lee +3 more |
2021-05-11 |
| 10915026 |
Substrate treating apparatus and substrate treating method |
Hae-Won Choi, Kihoon Choi, Ki-Moon Kang, Anton Koriakin, Jaeseong Lee |
2021-02-09 |
| 10908503 |
Apparatus for treating substrate |
Kihoon Choi, Do Heon Kim, Hae-Won Choi, Jaeseong Lee, Anton Koriakin +1 more |
2021-02-02 |
| 10490427 |
Apparatus for treating substrate |
Jung Bong Choi, Seong-Soo Kim, Oh Jin Kwon |
2019-11-26 |
| 9679788 |
Apparatus and method for treating substrate |
Eunsun Jung, Woo Young Kim, Jeong Seon Park |
2017-06-13 |
| 9275847 |
Recycling unit and substrate treating apparatus |
In-Il JUNG, Eun Sun Jung, Jeong Seon Park, Seong-Soo Kim |
2016-03-01 |