Issued Patents All Time
Showing 1–12 of 12 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12429283 | Method and apparatus for treating a substrate | Hae-Won Choi, Joon Ho WON, Min Woo KIM, Ki Hoon CHOI, Eung Su Kim +4 more | 2025-09-30 |
| 12198923 | Substrate processing method and substrate processing system | Hae-Won Choi, Sangjine Park, Keonyoung Kim, Sukhoon Kim, Seohyun Kim +3 more | 2025-01-14 |
| 11977332 | Substrate treating apparatus and substrate treating method | Hae-Won Choi, YeRim Yeon, Kihoon Choi, Youngran Ko, Jeong-Ho Cho +2 more | 2024-05-07 |
| 11940734 | Apparatus and method for treating substrate | Ki Hoon CHOI, Eung Su Kim, Pil Kyun HEO, Jin Yeong SUNG, Hae-Won Choi +1 more | 2024-03-26 |
| 11887866 | Supercritical processing apparatus | Jae Seong LEE, Hae-Won Choi, Ki Hoon CHOI, Chan Young Heo, Do Heon Kim +1 more | 2024-01-30 |
| 11530375 | Substrate cleaning compositions, substrate cleaning method and substrate treating apparatus | Hae-Won Choi, Kihoon Choi, Jaeseong Lee, Chan Young Heo, Do Heon Kim +1 more | 2022-12-20 |
| 11410862 | Apparatus for processing substrate including cooling member closer to central axis than heating member | Jaeseong Lee, Kihoon Choi, Hae-Won Choi, Chan Young Heo, Do Heon Kim +1 more | 2022-08-09 |
| 11004675 | Substrate cleaning composition, substrate treating method, and substrate treating apparatus | Hae-Won Choi, Ki-Moon Kang, Kihoon Choi, Chan Young Heo, Jaeseong Lee +3 more | 2021-05-11 |
| 10915026 | Substrate treating apparatus and substrate treating method | Hae-Won Choi, Kihoon Choi, Ki-Moon Kang, Chan Young Heo, Jaeseong Lee | 2021-02-09 |
| 10908503 | Apparatus for treating substrate | Kihoon Choi, Chan Young Heo, Do Heon Kim, Hae-Won Choi, Jaeseong Lee +1 more | 2021-02-02 |
| 10773281 | Anhydrous substrate cleaning composition, substrate treating method, and substrate treating apparatus | Ki-Moon Kang, In-Il JUNG, Hae-Won Choi | 2020-09-15 |
| 10711228 | Substrate treating apparatus and substrate treating method | Mong Ryong Lee, Miyoung Jo, YeRim Yeon | 2020-07-14 |