Issued Patents All Time
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12198923 | Substrate processing method and substrate processing system | Hae-Won Choi, Anton Koriakin, Sangjine Park, Sukhoon Kim, Seohyun Kim +3 more | 2025-01-14 |
| 11795550 | Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same | Jungah Kim, Mihyun PARK, Jinwoo Lee, Hyosan Lee, Hoon Han +2 more | 2023-10-24 |
| 11380537 | Method of manufacturing a semiconductor device and a cleaning composition for an adhesive layer | Hoyoung Kim, Hyo-Sun Lee, Soojin Kim, Jinhye Bae, Hoon Han +2 more | 2022-07-05 |
| 11028488 | Etching composition, a method of etching a metal barrier layer and a metal layer using the same, and method of manufacturing semiconductor device using the same | Jungah Kim, Mihyun PARK, Jinwoo Lee, Hyosan Lee, Hoon Han +2 more | 2021-06-08 |
| 10332740 | Method of manufacturing a semiconductor device and a cleaning composition for an adhesive layer | Hoyoung Kim, Hyo-Sun Lee, Soojin Kim, Jinhye Bae, Hoon Han +2 more | 2019-06-25 |
| 10242880 | Method of wet etching and method of fabricating semiconductor device using the same | Kwangsu Kim, Se-Ho Cha, Yongsun Ko, Kyunghyun Kim, ChangSup Mun +4 more | 2019-03-26 |