Issued Patents All Time
Showing 1–25 of 28 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12420316 | Substrate processing apparatus and substrate processing method | Jihwan Park, Kuntack Lee | 2025-09-23 |
| 12422754 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Younghoo Kim, Kuntack Lee | 2025-09-23 |
| 12308255 | Apparatus and method for drying substrate | Jihoon Jeong, Younghoo Kim, Kuntack Lee | 2025-05-20 |
| 12287147 | Wafer processing equipment and method of manufacturing semiconductor device | Youngtae Kim, Jihoon Jeong, Younghoo Kim | 2025-04-29 |
| 12278133 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Kuntack Lee, Jihwan Park, Seungmin Shin | 2025-04-15 |
| 12216408 | Apparatus for drying wafer and method for drying wafer | Jihoon Jeong, Younghoo Kim, Kuntack Lee | 2025-02-04 |
| 12211716 | Substrate processing apparatus and substrate processing method | Jaeseong Lee, Kihoon Choi, Hae-Won Choi, Jihoon Jeong, Seohyun Kim +2 more | 2025-01-28 |
| 12198923 | Substrate processing method and substrate processing system | Hae-Won Choi, Anton Koriakin, Keonyoung Kim, Sukhoon Kim, Seohyun Kim +3 more | 2025-01-14 |
| 12057323 | Substrate processing method, micropattern forming method, and substrate processing apparatus | Seohyun Kim, Sukhoon Kim, Jihoon Jeong, Younghoo Kim, Kuntack Lee | 2024-08-06 |
| 11935772 | Apparatus for processing a substrate | Seohyun Kim, Younghoo Kim, Kuntack Lee, Jihoon Jeong | 2024-03-19 |
| 11881426 | Substrate transferring unit, substrate processing apparatus, and substrate processing method | Kuntack Lee, Jihwan Park, Seungmin Shin | 2024-01-23 |
| 11640115 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Younghoo Kim, Kuntack Lee | 2023-05-02 |
| 11527399 | Wafer cleaning apparatus based on light irradiation and wafer cleaning system including the same | Byungkwon Cho, Yongsun Ko, Seulgee Jeon, Jihoon Jeong, Seongsik Hong | 2022-12-13 |
| 11424202 | Semiconductor devices having landing pads | Bowo Choi, Youngtak KIM, Suji Kim, Jaeuk SHIN, Hyunjung Lee +1 more | 2022-08-23 |
| 11393977 | Semiconductor device including vertical structures and a method of manufacturing the same | Jaeuk SHIN, Youngtak KIM, Hyeyeong Seo, Wonjun Lee | 2022-07-19 |
| 11302526 | Supercritical drying apparatus and method of drying substrate using the same | Byung-Kwon Cho, Jihoon Jeong, Youngtak KIM, Yongsun Ko, Seulgee Jeon | 2022-04-12 |
| 11217748 | Semiconductor device including a data storage material pattern | Youngtak KIM, Wonjun Lee, Hyeyeong Seo, Jaeuk SHIN | 2022-01-04 |
| 10714472 | Semiconductor devices and methods of fabricating the same | Kee-Sang Kwon, Boun Yoon, Myunggeun Song, Ki-Hyung Ko, Jiwon Yun | 2020-07-14 |
| 10128336 | Semiconductor devices and methods for manufacturing the same | Boun Yoon, Jeongnam Han | 2018-11-13 |
| 10084051 | Semiconductor devices including field effect transistors and methods of fabricating the same | Jae Hwan LEE, Yongsun Ko | 2018-09-25 |
| 9966432 | Semiconductor devices including an etch stop pattern and a sacrificial pattern with coplanar upper surfaces and a gate and a gap fill pattern with coplanar upper surfaces | Boun Yoon, Jeongnam Han | 2018-05-08 |
| 9960241 | Semiconductor device for manufacturing | Kee-Sang Kwon, Jae-Jik Baek, Boun Yoon | 2018-05-01 |
| 9859432 | Semiconductor devices having spacer protection pattern | Yongsun Ko, Hagju Cho, Byungjae PARK, Jeongnam Han | 2018-01-02 |
| 9748234 | Semiconductor devices and methods of fabricating the same | Kee-Sang Kwon, Boun Yoon, Myunggeun Song, Ki-Hyung Ko, Jiwon Yun | 2017-08-29 |
| 9716162 | Semiconductor device and method of fabricating the same | Jae-Jik Baek, Myunggeun Song, Boun Yoon, Sukhun Choi, Jeongnam Han | 2017-07-25 |