Issued Patents All Time
Showing 1–11 of 11 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 12422754 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Sangjine Park, Kuntack Lee | 2025-09-23 |
| 12308255 | Apparatus and method for drying substrate | Sangjine Park, Jihoon Jeong, Kuntack Lee | 2025-05-20 |
| 12293901 | Substrate processing apparatus including shower head and edge ring and related methods of manufacturing semiconductor devices | Woorim LEE, Sunggil Kang, Inseong KIM, Gonjun KIM | 2025-05-06 |
| 12287147 | Wafer processing equipment and method of manufacturing semiconductor device | Sangjine Park, Youngtae Kim, Jihoon Jeong | 2025-04-29 |
| 12225634 | Substrate heating apparatus and method for processing a substrate | Taehong Kim, Sunghyun Park, Kuntack Lee | 2025-02-11 |
| 12216408 | Apparatus for drying wafer and method for drying wafer | Sangjine Park, Jihoon Jeong, Kuntack Lee | 2025-02-04 |
| 12057323 | Substrate processing method, micropattern forming method, and substrate processing apparatus | Sangjine Park, Seohyun Kim, Sukhoon Kim, Jihoon Jeong, Kuntack Lee | 2024-08-06 |
| 11935772 | Apparatus for processing a substrate | Seohyun Kim, Sangjine Park, Kuntack Lee, Jihoon Jeong | 2024-03-19 |
| 11798801 | Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid | Hunjae JANG, Seungmin Shin, Kuntack Lee, Seungho Kim, Taehong Kim +1 more | 2023-10-24 |
| 11640115 | Substrate processing apparatus, semiconductor manufacturing equipment, and substrate processing method | Jihoon Jeong, Seohyun Kim, Sukhoon Kim, Sangjine Park, Kuntack Lee | 2023-05-02 |
| 11482410 | Apparatus including light source supplying light to wafer and window protector receiving a portion of chemical liquid | Hunjae JANG, Seungmin Shin, Kuntack Lee, Seungho Kim, Taehong Kim +1 more | 2022-10-25 |